High-Speed Semi-Automated Systems

  • Motorized XY chuck, motorized platen in SPS-2600, motorized Z movement of the chuck in SPS 2800 in standard configuration. Motorized theta is an option.
  • Servo motor-based, linear encoders.
  • Very cost competitive, very fast, high productivity solution
  • Highly recommended for medium scale production or other applications where throughput is important

Specifications
  • SPS-12000-HS
  • SPS-2800-HS
  • SPS-2600-HS

  • Wafer Size

    Up to 300mm

  • Motor type

    Servo motor

  • XY Stage Travel

    Up to 300mmx300mm

  • XY Stage Resolution, Repeatability

    Motorized, 0.15μm resolution, +/-1.2μm repeatability

  • XY Speed/ acceleration (max)

    Up to 1000mm/s, up to 35mm/s2

  • Z Speed

    20mm/s

  • Platen Travel

    12.7mm or 25mm

  • Platen Adjustment

    Dual coarse and fine control with better than 2.5µm repeatability

  • Platen Planarity

    <12.7μm across 200mm

  • Platen Rigidity

    <50μm for 4.5kg

  • Vacuum Chuck

    Multi-zone vacuum

  • Chuck Flatness

    +/-13μm

  • Chuck Breakdown Voltage

    At least 500V

  • Chuck Isolation

    At least 1GΩ

  • Chuck Adjustment

    360° coarse, +/-6° fine

  • Microscope

    High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X

  • Feedthrough Terminals

    BNC, Triax or Banana plug

  • System Dimensions

    101cm wide x91cm deep x 88cm high

  • Wafer Size

    Up to 200mm

  • Motor type

    Servo motor

  • XY Stage Travel

    Up to 200mmx200mm

  • XY Stage Resolution, Repeatability

    Motorized, 0.15μm resolution, +/-0.8μm repeatability

  • XY Speed/ acceleration (max)

    Up to 1000mm/s, up to 35mm/s2

  • Z Speed

    20mm/s

  • Platen Travel

    12.7mm or 25mm

  • Platen Adjustment

    Dual coarse and fine control with better than 2.5µm repeatability

  • Platen Planarity

    <12.7μm across 200mm

  • Platen Rigidity

    <50μm for 4.5kg

  • Vacuum Chuck

    Multi-zone vacuum

  • Chuck Flatness

    +/-13μm

  • Chuck Breakdown Voltage

    At least 500V

  • Chuck Isolation

    At least 1GΩ

  • Chuck Adjustment

    360° coarse, +/-6° fine

  • Microscope

    High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X

  • Feedthrough Terminals

    BNC, Triax or Banana plug

  • System Dimensions

    122cm wide x122cm deep x 92cm high

  • Wafer Size

    Up to 100mm

  • Motor type

    Servo motor

  • XY Stage Travel

    Up to 125mmx125mm

  • XY Stage Resolution, Repeatability

    Motorized, 0.1μm resolution, +/-0.5μm repeatability

  • XY Speed/ acceleration (max)

    Up to 1000mm/s, up to 35mm/s2

  • Z Speed

    20mm/s

  • Platen Travel

    12.7mm or 25mm

  • Platen Adjustment

    Dual coarse and fine control with better than 2.5µm repeatability

  • Platen Planarity

    <12.7μm across 150mm

  • Platen Rigidity

    <50μm for 4.5kg

  • Vacuum Chuck

    Multi-zone vacuum

  • Chuck Flatness

    +/-13μm

  • Chuck Breakdown Voltage

    At least 500V

  • Chuck Isolation

    At least 1GΩ

  • Chuck Adjustment

    360° coarse, +/-6° fine

  • Microscope

    High quality stereo zoom with up to 200mm working distance and magnification ranging from 3.5X to 180X

  • Feedthrough Terminals

    BNC, Triax or Banana plug

  • System Dimensions

    78cm wide x80cm deep x 58cm high