Fully Manual Systems

The SPS-2000 and SPS-2200 systems are MicroXact's premier manual probe stations designed to be flexible and easy to use. The high level of performance and affordability of these systems puts this station in the class of its own.

With up to 200mm wafer capabilities, DC or RF probes and optional thermal chuck, sub-micron positioning accuracy and a variety of shielding options our probe stations can be used for the wide range of applications, such as failure analysis, reliability testing, IV/CV testing and general characterization to name a few. With the variety of options available, the flexibility of this system is nearly limitless.

SPS-2000 DATASHEET

SPS-2200 DATASHEET

Features

• Fully manual stage assembly with precision cross roller bearings. Also available with additional preload slide for easy loading and unloading of wafers or samples.
• Fully manual control of platen with coarse and fine adjustments.
• Smooth powder-coated steel platen holds up to 10 magnetic or vacuum-based positioners.
• Isolated feedthrough terminals located on both sides of station for convenient connection to micropositioners can be customized for BNC, Triax or Banana plug connections.
• Standard boom mount assembly for full-range XYZ positioning of microscope.
• Available high resolution micropositioners with 80TPI screws for μm-level positioning of probes.
• RF options available include customizable RF probes, RF bias-able chuck, and shielding enclosures.

 

Options

• High-resolution compound microscopes.
• Polarizing microscopes.
• Wide selection of cameras.
• Precision XY stage with pneumatic position lock and single-hand positioning.
• RF biasable chuck and shielding enclosures.
• Polished brass or gold-plated adjustable vacuum chucks.
• +/-2.5μm flatness of the chuck.
• Ultra quite vacuum pump.
• Thermal chuck with temperature range of -100°C to +200°C.
• Adapted systems for ultrasonic and laser cutting.
• Optional choice of XY translation stage for microscope provide 2" x 2" range of motion.