Magnetic Probe Station
The MPS-C-300 and MPS-C-350 magnetic probe systems are the world’s first probe stations capable of providing three-dimensional magnetic field control around a device under test.
MicroXact’s truly unique patent-pending design enables wafer-level testing of spintronic devices, nanoscale electronics and many other materials and devices where magnetic fields are required for accurate test and measurement. Spin-current and spin torque oscillator testing, magnetic simulation and identification of anisotropy of complex multilayer structures are just few examples applications of our MPS systems.
Additional Information
Features
- MPS series magnetic probe stations are the only probe stations on the market that offer arbitrary two- or three-dimensional orientation of applied magnetic field, making these probe stations an ultimate solution for spintronic device characterization and spintronic research.
- MPS series magnetic probe stations are the only probe stations on the market that offer wafer-scale Vector magnetic field probing, making these systems ideally suited for testing of spintronic and magneto-electronic devices in production environments.
- Fully customizable, open-source LabView-based control software that easily integrates with the most common test and measurement devices.
- Available high-resolution micropositioners with 40, 80, 100 and 200TPI screws for down to micron-level positioning of probes.
- Data collected and/or analyzed with a wide range of output formats and options available.
- Systems are supplied with a three-dimensional Hall probe to provide unmatched stability and accuracy of the applied magnetic field via closed-loop control.
Magnetic Probe Station Specifications
- MPS-C-350
- MPS-C-300
- MPS-C-350
- MPS-C-300
MPS –C-350 is the most powerful MicroXact’s probe station for testing devices in 3D magnetic field.
It is available with and without feedback control loop.
The system uses three water-cooled C-magnets and requires either tap water or external chiller.
Various accessories (microscopes, micropositioners, DC or RF probes, light tight enclosure, thermal chucks) are available.
- Wafer Size
100mm, 150mm or 200mm
- Magnetic field orientation
Arbitrary 3D
- Maximum magnetic field
6kOe (0.6T)
- Magnetic field orientation accuracy
+/- 0.1°
- Magnetic field uniformity across 10mm diameter area
+/- 2%
- Magnetic field stability
Better than 0.1%
- Wafer XY positioning resolution
Better than 3μm (better than 2μm are available as option
- Platen Z travel
12.5mm
- Microscope
Several options available
MPS-C-300 is the less powerful but also more affordable version of MicroXact’s 3D magnetic field probe stations.
It is available with and without feedback control loop.
The system is upgradable to 150mm or 200mm wafers chucks.
Various accessories (microscopes, micropositioners, DC or RF probes, light tight enclosure, thermal chucks) are available.
- Wafer Size
100mm, 150mm or 200mm
- Magnetic field orientation
Arbitrary 3D
- Maximum magnetic field
3kOe (0.3T)
- Magnetic field orientation accuracy
+/- 0.1°
- Magnetic field uniformity across 10mm diameter area
+/- 2%
- Magnetic field stability
Better than 0.1%
- Wafer XY positioning resolution
Better than 3μm (better than 2μm are available as option
- Platen Z travel
12.5mm
- Microscope
Several options available