Semi-Automated Systems

SPS-2600

The SPS 2600 and SPS 2800 Series systems are MicroXact’s semi-automated probe stations designed to be flexible and easy to use. These systems are designed to support manual and semi-automatic probing of up to 200mm wafers.

These systems are built on a heavy-duty, versatile platform capable of being configured to handle a wide range of probing applications. With a variety of options available, including heated/cooled wafer chucks, standard or digital microscopes, and programmable stage indexing, MicroXact’s semi-automated probe stations offer cost-effective and easy to use solution.

SPS-2600 DATASHEET

SPS-2800 DATASHEET

 

Features

• Precision motor control of XY stage and platen. Also available with additional preload slide for easy loading and unloading of wafers or samples.
• Smooth powder-coated steel platen holds up to 10 magnetic or vacuum-based positioners.
• Isolated feedthrough terminals located on both sides of station for convenient connection to micropositioners can be customized for BNC, Triax or Banana plug connections.
• Standard boom mount assembly for full-range XYZ positioning of microscope.
• Available high resolution micropositioners with 80TPI screws for μm-level positioning of probes.
• RF options available include customizable RF probes, RF bias-able chuck, and shielding enclosures.

 

Options

• High-resolution compound microscopes.
• Polarizing microscopes.
• Wide selection of cameras.
• Precision XY stage with pneumatic position lock and single-hand positioning.
• RF biasable chuck and shielding enclosures.
• Polished brass or gold-plated adjustable vacuum chucks.
• +/-2.5μm flatness of the chuck.
• Ultra quite vacuum pump.
• Thermal chuck with temperature range of -100°C to +200°C.
• Adapted systems for ultrasonic and laser cutting.
• Optional choice of XY translation stage for microscope provide 2.5" x 2.5" range of motion.